1200C Multi-Zone CVD Tube Furnace OD120mm 3 Zones With Temperature Uniformity +/- 5C

1200C Multi-Zone CVD Tube Furnace (OD120mm, 3 Zones) with temperature uniformity +/- 5

Product Overview for 1700C Rotary Tube Furnace

Multi-Zone CVD Tube Furnace workstation consists of a multi heating zones tube furnace, a precision mass flow gas control station, a high vacuum pump units and other assembling parts such as furnace tube, flanges, etc. Tmax 1200°C, the ultimate vacuum rate goes to 10^-7 torr with molecular vacuum pump units. The mass flow gas control station mixes three or more kinds of gas together and inputs the mixed gas into a quartz tube or metal tubes inside the furnace. Multi-Zone Tube Furnace is competent for the experiments as CVD, Diffusion, and other thermo-treatments under vacuum status and atmosphere protection.

Main Features

• Tmax 1200°C
• Horizontal, Split, Multi-zone, CVD tube furnace
• Inconel 600 as processing tube
• Max vacuum level 10E-7 torr
• 3-channel precise mass flow gas control
• Multi-heating zones controlled separately ensure an improved temperature gradient
• Dual flanges support provides better sealing and longer tube life
• Type N thermocouples
• CE certified, standard

Safety Measures

• Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.
• Overheat protection shuts down the CVD tube furnace if temperature is outside of acceptable range (refer to controller’s manual) or when the thermocouple is broken or malfunctions.
• Power failure protection resumes furnace operation right after the point of failure when power is reestablished.
• Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot

Product Gallery

Front View for 1200C Rotary Tube Furnace

Technical Specifications

Application Notes

• Don’t fill any explosive gasses such as Hydrogen or Methane into the CVD furnace tube without necessary safety controls and supervision.
• Tube furnaces with metal tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa.
• Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating

Size Comparison